MEMS: Introduction and Fundamentals: Background and Fundamentals by Mohamed Gad-el-Hak
English | 29 Nov. 2005 | ISBN: 0849391377 | 469 Pages | PDF | 16 MB
As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest.