Fundamentals of Semiconductor Manufacturing and Process Control by Gary S. May
Publisher: Wiley-IEEE Press | May 22, 2006 | ISBN: 0471784060 | Pages: 488 | PDF | 5.2 MB
A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design. Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts.