"Microelectromechanical Systems and Devices" ed. by Nazmul Islam
InTeO | 2012 | ISBN: 9535103067 9789535103066 | 491 pages | PDF | 39 MB
This book is about the advances of microelectromechanical systems (MEMS) and devices, the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling.